ppt on Micro Electro Mechanical Systems (MEMS) .pdf download

Abstract

Over the last decade Micro-Electro-Mechanical Systems (MEMS) have
evoked great interest in the scientific and engineering communities. They are formed
by integration of electronic and mechanical components at micron level. They have
several substantive advantages: orders of magnitude smaller size, better performance
than other solutions, possibilities for batch fabrication and cost-effective integration
with electronics and potentially large reduction in power consumption, etc. This paper
will give an introduction to these exciting developments of MEMS, the fabrication
technology used and applications in various fields.

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